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词汇 SiC thin films
释义 SiC thin films
基本例句
碳化硅薄膜
SiC thin films of large area were prepared successfully in a plasma-enchanced CVD reactor at room temperature, with silane and ethene used as raw materials and Ar as carrier gas.采用射频等离子体增强的气相沉积法,以硅烷和乙烯为原料,在常温下成功的合成了碳化硅薄膜。
Study on Piezo-resistive Effect of SiC Thin Film碳化硅薄膜及压阻效应研究
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